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Q&A item.

Q&A item

Q&A: Import / Export of Lithographic Data

Q: How is it possible to export the information on a dose to other formats?
How is it possible to export the dose information to other formats? Our researchers told me that GDSII file do not carry dose information, only DXF can carry such information.
A: Yes, even basic GDSII is widely used format for lithography, it doesn't carry dose information directly. But it has some data types which can be used to carry dose information. Some other lithographic systems use this extension of GDSII as well as NanoMaker uses tag 14 (DATATYPE) as two-byte integer to carry dose information. So our GDSII files are compatible and contain dose information.

Your information about DXF is new for us. The DXF format is produced by the AutoCAD program as well as by a number of other inexpensive CAD programs for Windows/DOS and the Macintosh. These programs were not designed for lithography and so contain structures (e.g. three-dimensional figures) that have no meaning in this area. If you have any information how to carry dose in DXF files, please share it with us. We will be very grateful.

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