Fabrication of rainbow hologram with NanoMaker  Fabrication of Rainbow Hologram with NanoMaker
 NanoMaker  Скачать  Примеры Использования  Поддержка  Публикации  Контакты 
English      Russian
 Примеры Использования
 Требования к Микроскопу
 Требования для Инсталляции
Site search by Google
Рейтинг@Mail.ru  eXTReMe Tracker
Q&A item.

Q&A item

Q&A: Proximity Correction. Simulation of Development

Q: We are looking for proximity correction software for our 100 kV e-beam lithography system. Could your software be used for proximity correction at 100 kV?
A: Yes, our proximity correction software can be used at high-voltage lithography systems. We did the proximity data correction for 100 kV machine and get reasonable result. The only task is to transfer proximity corrected data to your system. The common way is to export data from NanoMaker to GDSII file format and then transfer data from GDSII file to your EBL system format by a special software.
Back to Q&A list
    Copyright © 2002-2017 Interface Ltd. & IMT RAS