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Q&A item.

Q&A item

Q&A: General

Q: Is there a feedback in stage control system and with what accuracy the coordinates of the stage could be set?
Is there a feedback in stage control system and with what accuracy the coordinates of the stage could be set? Is there any possibility to measure the values of stage coordinates? With what accuracy?
A: The accuracy depends on the type of the stage. The standard motorized stages do not have the feedback loop. Their absolute accuracy is about 5 microns. Stages with laser interferometers are provided with feedback loop. Their movement accuracy is not very high (inaccuracy is within a micron) but the accuracy of measuring the stage position is quite high (~0.01 microns), and this enables us to correct the stage inaccuracy by shifting the e-beam (using software correction) to the right position with NanoMaker.
To apply the NanoMaker features to control the specific type of the stage it is necessary to have an appropriate stage driver.
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