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Q&A item.

Q&A item

Q&A: General

Q: What is the NanoMaker writing speed?
A: NanoMaker writing frequency (minimal addressing time between two different points) currently is 20 MHz with Elli30 PCIe PG (or 7 MHz with Elli29 PCI PG). In reality writing speed is determined not only with the writing frequency but mainly with speed of lithograph deflection system, properties of electron gun and resist. In particular, total exposure time depends on dynamic errors of SEM/lithograph (delays in coils and amplifiers of deflection system). Other lithography systems usually use settling time before each scan line that can increase exposure time in 10 times in comparison to pure exposure time. NanoMaker has special mode for active compensation of dynamic delays during exposure. It also has a special procedure for delay measurement. The active compensation gives possibility to decrease settling time almost totally and even makes it possible to write without beam blanker. Such mode works excellent if dynamic errors smaller then some percents of jump distance between addressing (writing) points.
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