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Q&A: Recommended Parameters, Monte Carlo Calculation

Q: We’ve purchased a new E-beam resist which requires lower sensitivity value. How low sensitivity value can I apply (ex. 0.1 or 0.01)?
A: You can apply any value of sensitivity as you want (we assume the Sensitivity [uA*s/(cm*cm)] in Recommended Parameters dialog). But you must to take into account a few moments:
  1. Combination of chosen values of Sensitivity, Beam Current and Area Steps should produce Recommended Dwell Time value not less then Min Dwell Time (Driver's Time) of your Pattern Generator. If you are forced to use a small probe current, you can defocus a beam to choose large step during writing.
  2. If you are using very sensitive resist you need to take special care to protect your resist from overexposure during aiming activity.
  3. Take into account the general rule: the more sensitive resist - the worse its resolution.
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