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Q&A item.

Q&A item

Q&A: Batch Processing

Q: Could you tell me how to do the batch process in detail?
Could you tell me how to do the batch process in detail? I thought the batch process is applicable only to repeating pattern. When the batch process is applied, can the process time be increased?
A: Please read the most important information about Batch Processing in help. Almost all you need is written in that document.

You will fill in Selected Commands list with commands in order you need to execute them.
For example,

  • start with the LoadParFile(), to load previously saved Field Size, Exposure Steps, Dwell Times and other exposure parameters (Use Stage, Use Subfields and so on if you want to use stage at Exposure command execution). The alternative is to expose just one scanfield (the exposed structure had to fit into Field Size) and move stage by MoveStagexx command.
  • add OpenGdbFile() – to load first GDB file you want to expose
  • SelectStructure() – to select structure from the list of structures in the file you want to expose
  • SelectLayers() - to select layers in the selected structure you want to expose
  • BeamOff() – to switch beam off before stage move
  • MoveStageXY() – to move stage in start position
  • Exposure() – to start exposure (or ExposureEx() with optional parameters)
  • BeamOff() – to switch beam off before stage move
  • MoveStageUVRel() – to move stage to next writing position
  • Exposure() – again and so on.
    Or close first GDB file with the CloseGDBFile() and load another GDB file by OpenGdbFile() command and repeat next commands.

    Batch processing doesn't increase overall procedure time. Most of the time is spent to exposure itself and stage movements.

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